Semiconductor

🔧 UHV Gas Delivery Fittings & Manifolds

VCR male glands and female nuts, micro-gaskets, double-ferrule compression sleeves, multi-port gas mixing monoblocks, check valve plungers, laser-drilled micro-orifice disks, quick-disconnect couplers, Y-shaped splitter connectors

Design Principles

Material: Grade 2 (CP-Ti) ultra-pure vacuum melt for VCR glands and gaskets — zero trace metal outgassing. Grade 5 for female nut couplings and check valve plungers requiring high thread strength and cyclic fat

Form: Bar stock for VCR components and manifold blocks via CNC turning/boring. Laser drilling for micro-orifice disks. Hot forging + machining for Y-shaped splitters to maintain smooth internal transitions.

Engineering Trends

  • ▸ Process: CNC turning of VCR male/female components
  • ▸ Process: Deep-hole boring of multi-port manifolds
  • ▸ Process: Laser micro-drilling of orifice disks

Components in This System

Titanium Double Ferrule Back Ring

Back ring for compression tube fitting

Titanium Double Ferrule Front Sleeve

Front ferrule for compression tube fitting

Titanium Gas Check Valve Plunger

Gas line check valve plunger

Titanium Gas Quick-Disconnect Coupler

Utility quick-disconnect vacuum coupler

Titanium Gas Y-Splitter Connector

Y-shaped forged gas splitting connector

Titanium Micro-Orifice Restrictor

Laser-drilled micro-aperture gas restrictor disc

Titanium Multi-Port Gas Manifold

Monoblock multi-port gas mixing manifold

Titanium VCR Female Nut

VCR female nut coupling for UHV gas lines

Titanium VCR Male Gland

VCR male gland fitting for UHV gas lines

Titanium VCR Micro-Gasket

Titanium micro-gasket for VCR knife-edge seal

Related Capabilities

CNC turning of VCR male/female components Deep-hole boring of multi-port manifolds Laser micro-drilling of orifice disks

Standards Reference

Standards: ASTM B348 Grade 2 (UHP melt) / Grade 5, electropolished, 100% He leak tested + PMI certified, Class 100 packaged, center-vented per SEMI F1 for virtual leak elimination

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Knowledge Graph

Semiconductor

Industry

🔧 UHV Gas Delivery Fittings & Manifolds

System

🔩 Components

10 parts

⚙️ Capabilities

3 related

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Material Specifications → Industry Applications → All Services → Capabilities →

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