Titanium Exhaust Baffle Plate is an ultra-clean lower exhaust plenum component designed for Lower exhaust plenum baffle plate. Manufactured from Grade 2 CP-Ti with Class 100 cleanroom protocols, it provides the non-magnetic, low-outgassing, and particle-free performance essential for wafer fabrication environments.
Titanium Exhaust Baffle Plate
Titanium Exhaust Baffle Plate
Lower exhaust plenum baffle plate
| Technical Parameter | Specification Value |
|---|---|
| International Compliance | ASTM B348, ISO 9001 |
| Surface Finish & Max Temp | Bead blasted matte Ra 1.6-3.2um + passivation |
| NDT & Quality Control | Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360 |
- • 100% Traceability: Mill Test Certificate (EN 10204 3.1) with heat analysis & mechanical testing.
- • NDT Verification: Helium Mass Spectrometry Leak Detection per ASTM E493 (<1e-9 mbar·L/s); Particle Count Verification per SEMI E98 (Class 100); Surface Profilometry per ISO 4287 (Ra verification); Positive Material Identification (PMI) via XRF per ASTM E1476; Dimensional verification via CMM per ISO 10360.
- • Compliance: REACH, RoHS 3 certified. FAI AS9102 available.
- • Process: CNC turning , heat treatment , surface grinding , passivation , dimensional check .
- • Thermal Stress Relief: Post-machining vacuum annealing (540-675°C under Argon) reduces distortion risk >70%.
- • Rolled Threads: Thread rolling (not cutting) increases fatigue limits by 30-50%.
Q: Is Titanium Exhaust Baffle Plate compatible with fluorine-based process chemistries? ▼
Grade 2 CP-Ti has excellent resistance to NF₃, CF₄, SF₆, and other fluorine-based plasma chemistries used in semiconductor etching and chamber cleaning. The TiO₂ passive layer forms a stable TiF₄ reaction product that does not spall or generate particles. However, Titanium Exhaust Baffle Plate should not be used in HF-containing wet processes where corrosion rates exceed 0.5 mm/year.
Q: What is the typical lead time for Titanium Exhaust Baffle Plate orders? ▼
Standard lead time for Titanium Exhaust Baffle Plate is 15-25 business days depending on quantity and complexity. Rush orders (3-5 working days) are available for prototype evaluation. Sample evaluation (1-5 units) can be expedited to 5-7 business days. Volume pricing is available for production quantities above 100 units.
Q: What material certifications are provided with Titanium Exhaust Baffle Plate? ▼
Each Titanium Exhaust Baffle Plate shipment includes EN 10204 Type 3.1 mill test certificate with chemical analysis, mechanical properties, and heat identification. Dimensional inspection reports and Certificate of Conformance (CoC) are standard. First Article Inspection Reports (FAIR) per AS9102 are available on request for lower exhaust plenum.
§ Grade 2 CP-Ti Selection for lower exhaust plenum
Function
Engineered as a Chamber Shield component, this part serves the specific function of . Grade 2 CP-Ti (Bead Blasted) was selected for its proven performance in Semiconductor service conditions.
Specifications
- SKU: TI-SEM-CHA-EXHAUS
- Category: Chamber Shield
- Industry: Semiconductor
- Material: Grade 2 CP-Ti (Bead Blasted)
- Process: CNC turning , heat treatment , surface grinding , passivation , dimensional check
- Weight: 40% mass reduction vs standard steel components with same load rating
§ UHV Particle & Surface Contamination Verification
Quality Management
Manufactured under ISO 9001:2015 with full EN 10204 Type 3.1 material traceability from ingot to finished Titanium Exhaust Baffle Plate. All critical features are CMM-verified and documented in the First Article Inspection Report.
Inspection & NDT
100% CMM dimensional inspection per ISO 10360 on critical features; surface roughness verification per ISO 4287; material grade verification via PMI
§ Cleanroom Manufacturing & Finishing Process
Titanium Exhaust Baffle Plate is manufactured using CNC turning , heat treatment , surface grinding , passivation , dimensional check . Each operation is performed by certified machinists with real-time process monitoring and dimensional verification at critical stages. Heat code traceability is maintained throughout all production steps.
Commercial Logistics & Procurement Framework
Pricing and lead times for Titanium Exhaust Baffle Plate are batch-dependent. Contact our supply chain team for volume-based tiered pricing.
Regulatory & Quality Assurance Ledger
Verifiable certifications for Titanium Exhaust Baffle Plate
Material Test Certificate (MTC)
EN 10204 3.1
Environmental Compliance
REACH (EC No 1907/2006)
Restricted Substances
RoHS 3 Directive (2015/863/EU)
Quality Management System
AS9100D
Standard: ASTM B348
Standard: ISO 9001
ISO 9001
Systems Interconnectivity & Topology
Cross-functional integration matrix for Tier-1 supply chains and assembly orchestration.
- ▸ Mechanical Subsystem A
- ▸ Structural Carrier Assembly
Titanium Exhaust Baffle Plate
Material: Grade 2 CP-Ti (Bead Blasted)
SKU: TI-SEM-CHA-EXHAUS
Industry: Semiconductor / System: Plasma Chamber Liners, Shields & Thermal Hardware
- ▸ Mounting Bracket Kit
- ▸ Threaded Insert Set
- ▸ Torque Specification Tag
Custom Titanium Part
Ready to manufacture Titanium Exhaust Baffle Plate (SKU: TI-SEM-CHA-EXHAUS)? Contact our engineering team for a custom solution.
Custom Titanium PartRelated Knowledge
Material
Grade 2 CP-Ti
Capability
Electropolishing + Class 100 ultrasonic cleaning
Surface Treatment
Capability
Electropolishing of all vacuum-facing surfaces
Surface Treatment
Capability
Electropolishing of all wetted surfaces
Surface Treatment
System
Plasma Chamber Liners, Shields & Thermal Hardware
One Metal. One Focus. Infinite Precision.
Founded in 2011 in Baoji's Titanium Valley, BOZE Metal is dedicated exclusively to titanium — from raw material to precision engineering. AS9100D, ISO 13485 & ISO 9001 certified with 500+ clients across Aerospace, Medical & Motorsport industries, we deliver end-to-end precision titanium CNC machining with full material traceability from source to component.
Boze Titanium Manufacturing Center is operated by Baoji Boze Metal Products Co., Ltd.